High Vacuum Gauge Sensors (1x10e-12 – 760 torr)

Apex Gas Control
Leybold Product Overview
Request a Quote
Leybold Penningvac High  Vacuum Gauge

 Types of Vacuum Sensors
10e-10 torr to atmosphere

Penningvac Sensor
Indirect Cold Cathode - Range 1 x 10-8 mbar - 1500 mbar

Ionic  Sensor
Indirect Hot Cathode- Range 10-10 to 10-1 mbar 

Ceravac Transmitters - Direct Measurement

Ionivac IM540 for UHV (ultra-high vacuum)
Bayard-Alpert Cold Cathode Passive Sensor

 

Vacuum Sensors for Rough Vacuum (1 millitorr to 760 torr)

The vacuum pressure range from atmosphere to ultra-high vacuum (UHV) is over 16 orders of magnitude. To cover this range requires more than one sensor type. High vacuum can be defined from the bottom of the milltorr range to 10e -10 torr. Most high vacuum gauge sensors are packaged with a rough vacuum sensor to cover the entire vacuum range. Exception is ultra-hig vacuum (UHV) applications where an additional gauge sensor is needed. High vacuum gauge sensors are ionization gauges. These can be either hot cathode or Bayard-Alpert cold cathode. 

The measurement range is the decisive factor for an appropriate vacuum gauge. The chart below shows the type sensors and models for the pressure range. The corresponding gauge controller is also provided in the chart for the proper sensor.

 

vacuum gauge type for pressure range

 Types of Vacuum Sensors

 

Bayard Alpert Cold Cathode Gauge sensor

Penningvc Transmitters

These PENNINGVAC transmitters are the perfect gauge for a wide range of applications. Combines a MEMS-Pirani with Penning high vacuum sensor to cover the full vacuum range from atmosphere to high vacuum. Pennivac is an active gauge with input/output a log-linear 0-10V.

Principle of measurement
Cold cathode ionization after Penning combined with thermal conductivity (MEMS Pirani)

Measurement/display rang
1 · 10-8 to 1000 mbar


Leybold Hot Cathode Gauge sensor

Ionivac Transmitters

The IONIVAC uses a hot cathode ionization with a Pirani sensor for full range display of vacuum measurement. Ionivac can be used on non-combustible gases and gas mixtures within a wide range of pressures. Optionally, the pressure can be displayed on an integrated display.  Ionivac is an active gauge with input/output a log-linear 0-10V.

Principle of measurement
Pirani / hot cathode ionization (Bayard-Alpert) combination

Measurement/display ran
5 · 10-10 to 1000 mbar


Vacuum CDG

CERAVAC Transmitters

The CERAVAC Capacitance Diaphragm Gauge (CDG)direct measurement of an Inconel diaphragm defection to measure vacuum pressure. They are resilient to vibration and pressure bursts and  and provide good resistance to corrosive process gases. 

Principle of measurement

Capacitive diaphragm stainless steel sensor

Measurement/display range- 10-5 to 1000 torr


Leybold Vacuum Graphix Vacuum Gauge Controller

Graphix Series Vacuum Gauge Controller

Vacuum gauge controller with 1-3 channels for all active sensors. Graphix has a 3.5" TFT touchscreen interface, easy to read bar graph display and ability to test to detect leaks using a pressure rise test.

Readout selectable between mbar, Torr, Micron, Pascal or Psi
Up to 6 adjustable set points
Internal and external data-logging (USB port on the front) for configurati- on and real-time measurement data
Sensor control function (degas and zero adjustment)
Selectable languages: English, German, Chinese, Japanese

 

Leybold Vacuum Gauge Read-out

Display One. Display Two & Display Three Vacuum Gauge Display

Display One (Display Two or  Display Three) Vacuum Gauge Displays  provides cost effective display technology of  vacuum pressures. The Display One can be used with any of the active sensor  Leybold Vacuum sensors. Readout selectable between mbar,Torr or Pascal. Chart recorder 0-10V output provided.

 

UHV vacuum gauge Leybold IM540
UHV vacuum gauge Leybold IM540

Ionivac IM540 Vacuum Gauge for UHV

The IONIVAC IM540 is a Bayard-Alpert sensor vacuum gauge for measuring ultra-high vacuum pressures. The IONIVAC IM540 is a passive gauge system meaning the sensor and read-out must be used together for vacuum pressure measurement. The IM540 has two channels to handle two UHV measurement sensors. One channel can be used for roughing vacuum gauge such as Thermovac or Ceravac Sensor.

Principle of measurement

Bayard-Alpert Cold Cathode

Measurement/display range- 10e-12 to 1100 mbar