Vacuum Valves

Vacuum Valves

Right Angle Valves
Vacuum Gate Valves
Vacuum Ball Valves

Vacuum Valves for rough, high vacuum and ultra-high vacuum applications

Vacuum Gate Valve
Vacuum Gate Valve
Vacuum Ball Valve
high vacuum gate valve
high vacuum gate valve
vacuum poppet valve

High Vacuum Gate Valves

High vacuum gate valves provide isolation for high vacuum pumps, such as turbo pumps, ion pumps or cry-pumps. Gate Valves are provided in manual and pneumatic designs and  for clean and  low outgassing high vacuum applications.  Flanges can be either NW, ISO or CF.  Three position gate valves are available for pressure control process steps.

Ultra-High Vacuum Gate Valves

Ultra-High Vacuum (UHV) gate valves provide low outgassing isolation for applications needing ultra-high vacuum or vacuum bake-out. CF Flanged gate valves use a knife edge seal with copper gaskets bonnet seal. Both manual and pneumatic designs are available. Bake-out temperatures can be as high as 200C with the valve open and 150C with the valve closed.

Right Angle Valves

Right angle or poppet vacuum valves provide vacuum isolation of vacuum systems. In addition, right angle valves provide isolation of roughing pumps from the vacuum system. Flanges for these valves can be tube end, NW, ISO or CF. Right angle valves are available in either manual or pneumatic applications. Valves can be provided with or without solenoids.

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11000 Series
Stainless Steel
Gate Valve

The KF, ISO-F and ISO-K flanged 11000 Series Standard Cycle Gate Valves are vacuum valves designed for high vacuum applications. These valves provide isolation valving for high vacuum pumps including cryopumps, turbo pumps, ion pumps and other applications requiring clean, low outgassing valves.

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11000 Series
Stainless Steel
Gate Valve

The CF flanged 11000 Series Standard Cycle Gate Valves are vacuum valves designed for high vacuum and ultra-high vacuum applications. These valves provide isolation valving for high vacuum pumps including cryopumps, turbo pumps, ion pumps and other applications requiring clean, low outgassing valves.

Copper Bonnet Seal

Manual Operation

Manual Copper Bonet High Vacuum Gate Valve

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Copper Bonnet Seal 

Pneumatic Operation

Pneumatic Gate Valve with Copper Bonnet

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21200 Series
Stainless Steel
Viton Seal
Million Cycle
Gate Valve

The Million Cycle Gate Valves Series are vacuum valves designed for high vacuum applications when pressure ranges approximate 1 x 10-9 mbar and bakeout temperatures do not exceed 150°C. There are no mechanical locks inside vacuum, which is extremely beneficial for semiconductor and sensitive processes requiring vibration-free operation. All moving joints have hardened shafts, reducing particulate generation and providing smoother actuation. These valves provide valving for cryopumps, turbo pumps, ion pumps and other applications requiring clean, high cycle, low outgassing valves.

Viton Sealing O-Ring Bonnet and Gate

Pneumatic Operation

21200 Million Cycle Gate Valve

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11000 Series
Stainless Steel
Viton Seal
3-Position

The 3-Position Gate Valves are designed for use in etching, CVD and any other process that requires pressure control. When used in conjunction with upstream mass flow controllers, this series valve will contribute to an exceptional pressure control capability. The valves employ two pneumatic solenoids and an air pressure regulator to achieve the three positions of fully open, fully closed, and an adjustable third position. One solenoid controls the fully open and fully closed positions while a second solenoid controls the third position.

Viton Sealing O-Ring Bonnet and Gate

Pneumatic Operation

Three Position Gate Valve

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