Faster Response

Pinpoint  Accuracy

Extended Measurement Range

Lower Cost

Digital Display

30 On-Board Gases

Flows from as low as 0.5sccm full scale

Apex Mass Flow Controllers and Mass Flow  Meters for vacuum and non-vacuum applications combine flexibility with great accuracy. Flexibility to choose from a list of 30 on-board gases, to choose your input and output voltage and the ability to use RS232 communications. The ability to control up to 26 Apex devices through one RS232 port, provides your set-up the ultimate in flexibility.

Accuracy of 0.2% full scale plus 0.8% of reading approaches the accuracy of a digital mass flow meter or controller.

The convenience of an on-board controller and display provides readings without expensive read out boxes. Our simple and inexpensive power wall plug replaces any complex and expensive power supply box.

Flexibility, Accuracy and Less Costly make the choice easy.  For models and pricing:

Apex Mass Flow Controllers   0.5 sccm    1 sccm    2 sccm   5 sccm   10 sccm   20 sccm

                                                     50 sccm     100 sccm    200 sccm    500 sccm   1 slpm

                                                     2 slpm      5 slpm 

Apex Mass Flow Meters          0.5 sccm    1 sccm    2 sccm    5 sccm   10 sccm   20 sccm

                                                    50 sccm     100 sccm     200 sccm     500 sccm    1 slpm

                                                    2 slpm      5 slpm

One Instrument…Accurate..Repeatable for 30 On-Board Gases

 Apex Mass Flow Controllers

 Apex Mass Flow Meters

 Apex Frequently Asked Questions

Need More Reasons to Choose ?

Using the Apex Vacuum Products(MFC, MFM, PC) in a research laboratory

Using the Apex Vacuum Products(MFC, MFM, PC) in a system

Apex Benefits and Advantages

The Apex Mass Flow Controllers and Apex Mass Flow Meters are designed to be used in vacuum systems where precise gas flow is required. Applications include, vacuum coating, CVD Processes, PVD Processes, e-beam thin film deposition, sputtering, vacuum sputtering, thin film sputtering, thermal evaporation. Also thin film, optical coating, cathodic arc sputtering and magnetron sputtering.

Apex Vacuum Mass Flow Controllers and Mass Flow Meters are also used in pressure control and vacuum pressure control processes. The Apex Mass Flow Controller outputs and inputs allow the user to replace other mass flow controllers and mass flow meters such as MKS, Brooks, Celerity, Unit, Sierra and Hastings

Also can be used in leak detection systems for mass flow leak detection systems and with a pressure controller Pressure Decay Leak Detection Systems.

Try Apex Vacuum today in vacuum coating applications.