For models and online pricing: 

Apex Mass Flow Controllers   0.5 sccm    1 sccm    2 sccm   5 sccm   10 sccm   20 sccm

                                                     50 sccm     100 sccm    200 sccm    500 sccm   1 slpm

                                                     2 slpm     5 slpm   10 slpm   20 slpm  50 slpm  100 slpm

                                                     250 slpm  500 slpm  1000 slpm  1500 slpm  2000 slpm

Apex Mass Flow Meters          0.5 sccm    1 sccm    2 sccm    5 sccm   10 sccm   20 sccm

                                                    50 sccm     100 sccm     200 sccm     500 sccm    1 slpm

                                                    2 slpm     5 slpm   10 slpm   20 splm   50 slpm   100 slpm

                                                    250 slpm  500 slpm  1000 slpm  1500 slpm  2000 slpm

Other Information:

Options for Mass Flow Controllers

Power Cables- Communication Cables

Control Software- LabView Drivers

Apex Mass Flow Controllers- Product Literature

Apex Mass Flow Controller Basic Specifications

Apex Mass Flow Controller Manual

Frequently Asked Questions

Application Example using Multiple Apex Devices

Apex Mass Flow Controllers and Mass Flow Meters are in use all over the world in both Research and Industrial Applications. Both OEM equipment builders and some of the worlds finest reseachers can take advantage of the Apex Vacuum Mass Flow Controllers benefits and low price.

Applications Include:

• Vacuum evaporative coating

• Vacuum Sputtering

• Ion-Beam Deposition

• Other thin film vacuum coatings

• High Temperature Furnaces- Gas Control

• E-Beam Coating Systems

• Hydrogen Fuel Cell Research

• University Research

Need More Reasons to Choose ?

Using the Apex Vacuum Products in a research laboratory

The Apex Mass Flow Controller, Mass Flow Meter and Pressure Controllers are uniquely suited for use in a research laboratory. All Apex products can be powered through a CD type plug into a 120V outlet. Thus no expensive power supplies are needed. This simplifies the laboratory set-up.

Up to 26 Apex Mass Flow Controllers or Mass Flow Meters can be controlled with FlowVision software through one addressable RS 232 port. The 30 onboard gases can be changed also through this software. So imagine a bank of mass flow controllers with the ability to change gases and fully control any one. Then imagine all mass flow controllers powered by one source plugged into a wall outlet. This is a reality with Apex. Have the ultimate in flexibility and save a lot of bucks! Not only that, you get better accuracy than other competitive products and great repeatability.

There are 22,000 devices in the field with this design with an unusual lifetime warranty.

Some Applications for the Apex Mass Flow Controller.

The Apex Mass Flow Controllers and Apex Mass Flow Meters are designed to be used in vacuum systems where precise gas flow is required. Applications include, vacuum coating, CVD Processes, PVD Processes, e-beam thin film deposition, sputtering, vacuum sputtering, thin film sputtering, thermal evaporation. Also thin film, optical coating, cathodic arc sputtering and magnetron sputtering.

Apex Vacuum Mass Flow Controllers and Mass Flow Meters are also used in pressure control and vacuum pressure control processes. The Apex Mass Flow Controller outputs and inputs allow the user to replace other mass flow controllers and mass flow meters such as MKS, Brooks, Celerity, Unit, Sierra and Hastings

Also can be used in leak detection systems for mass flow leak detection systems and with a pressure controller Pressure Decay Leak Detection Systems.

Try Apex Vacuum today in vacuum coating applications.