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Faster
Response
Pinpoint
Accuracy
Extended
Measurement Range
Lower Cost
Digital
Display
30 On-Board
Gases
Flows from
as low as 0.5sccm full scale
Apex Mass Flow Controllers and
Mass Flow Meters for vacuum and non-vacuum
applications combine flexibility with
great accuracy. Flexibility to choose from a list of 30
on-board gases, to choose your input and output voltage and
the ability to use RS232 communications. The ability to
control up to 26 Apex devices through one RS232 port,
provides your set-up the ultimate in flexibility.
Accuracy of 0.2% full scale
plus 0.8% of reading approaches the accuracy of a digital
mass flow meter or controller.
The convenience of an on-board
controller and display provides readings without expensive
read out boxes. Our simple and inexpensive power wall plug
replaces any complex and expensive power supply box.
Flexibility, Accuracy and Less
Costly make the choice easy. For models and pricing:
Apex Mass Flow Controllers
0.5 sccm
1 sccm
2
sccm
5
sccm
10 sccm 20
sccm
50 sccm
100 sccm
200 sccm
500 sccm
1
slpm
2
slpm
5
slpm
Apex Mass Flow Meters
0.5
sccm
1
sccm
2
sccm
5
sccm
10 sccm
20 sccm
50
sccm
100 sccm
200 sccm
500 sccm
1
slpm
2
slpm
5
slpm
One Instrument…Accurate..Repeatable for
30 On-Board Gases


Apex
Mass Flow Controllers
Apex
Mass Flow Meters
Apex
Frequently Asked Questions
Need More Reasons to Choose
?
Using the Apex Vacuum Products(MFC, MFM, PC) in a research
laboratory
Using the Apex Vacuum Products(MFC, MFM, PC) in a system
Apex Benefits and Advantages
The Apex Mass Flow Controllers and
Apex Mass Flow Meters are designed to be used in vacuum
systems where precise gas flow is required. Applications
include, vacuum coating, CVD Processes, PVD Processes, e-beam
thin film deposition, sputtering, vacuum sputtering,
thin film sputtering, thermal evaporation. Also thin
film, optical coating, cathodic arc sputtering and
magnetron sputtering.
Apex Vacuum Mass Flow Controllers
and Mass Flow Meters are also used in pressure control
and vacuum pressure control processes. The Apex Mass
Flow Controller outputs and inputs allow the user to
replace other mass flow controllers and mass flow meters
such as MKS, Brooks, Celerity, Unit, Sierra and Hastings
Also can be used in leak detection
systems for mass flow leak detection systems and with a
pressure controller Pressure Decay Leak Detection
Systems.
Try Apex Vacuum today in vacuum
coating applications.
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