Schoonover, Inc. - Vacuum Equipment

Vacuum Coating Systems- Denton Vacuum

Denton Vacuum Systems

Denton Vacuum designs and manufactures vacuum coating systems to deposit ultra-thin metallic and dielectric coatings. These coatings are used in industrial and research applications ranging from optics, semiconductors, electro-optics, display, tribology, medical devices, to telecommunications. Systems can be configured for magnetron sputtering, electron beam deposition, ion beam deposition, thermal evaporation (or thermal evaporation) and etch.

Explorer� Systems Series( Electron Beam System, Resistance-Thermal System, Sputtering System, Microscopy System)

The Explorer� System Series is vacuum coating system perfect for R&D Facilities.

The Explorer� Series can be equipped for these coating technologies:

Electron Beam Systems

Resistance-Thermal Deposition

Sputtering Deposition

A number of options are available to customize for most all high vacuum coating applications.

Bench Top Turbo ( Sputtering System )

Perfect for bench top R&D

coating applications. The Bench Top Turbo Series can be used for sputtering and thermal evaporation.

Vacuum coating applications include: high vacuum carbon coating for TEM & x-ray analysis; sputtering of noble metals for SEM analysis; carbon support films; carbon platinum replicas; rotary shadowing; aperture cleaning; asbestos analysis; resistance evaporation of metallic compounds; failure analysis; hi resolution sputtering for fine grain films. The Bench Top Turbo is perfect for laboratory applications.

Denton�s Discovery� HDG( Ion Beam Deposition System, Reactive Ion Etching System, Sputtering System)

The Denton Discovery� HDG is a turn-key deposition tool for development and production applications.

Turn-key applications for the Denton Discovery� HDG

Ion Beam Deposition & Ion
     Beam Assisted Deposition
         � High density films
         � Environmental stability
         � Stable deposition rates
         � Stoichiometry control

Ion Beam Etch &
Reactive Ion Beam Etch
� Excellent etch uniformity

Wide Range of Options

    � Ion Sources
    � Substrate Fixturing
    � End-point Control
    � RGA
    � Process Automation

Denton Desktop Pro ( Sputtering Systems)

The Denton Vacuum Desktop Pro is designed to address the needs for R&D high performance magnetron sputtering vacuum coating applications. The Denton Desktop Pro can be outfitted with up to 2" magnetrons. Footprint requires less than 36" of counterspace.

Denton Desk IV (Resistance-Thermal System, Sputtering System)

The Denton Desk IV is designed for electron microscopy sample preparation. The Desk IV is available in a simple mechanically pumped configuration for sputtering of noble metals or carbon evaporation. The turbo pumped model is available for ultra fine grain sample preparation.

Product Literature Rack

Explorer� Systems Series

Discovery� HDG- Sputtering

Discovery� HDG- Ion Beam Deposition

Discovery� HDG Ion Beam Etch-RIE Etch

Bench Top Turbo

Denton Desktop Pro

Denton Desk IV