PDF Catalogs   Modified Size Description Catalog 2004 02/21/06 20.9MB Our Complete 224 Page Catalog (US pricing, International pricing may vary) Flanges & Fittings 02/21/06 377KB ASA Flanges & Fittings 02/21/06 1.4MB CF Flanges & Fittings, Wire Seal Flanges 02/21/06 306KB EVAC Flanges 02/21/06 938KB NW Flanges & Fittings 02/21/06 641KB ISO Flanges & Fittings 02/21/06 562KB Adapter Fittings 02/21/06 664KB Flexible Hoses & Couplings 02/21/06 508KB Weld Fittings Isolation Valves Poppet, Genesis, Gate, Butterfly, Ball and Leak Valves 02/21/06 2.7MB Isolation Valves 07/25/06 828 KB **NEW** JV Series Valve Downstream Pressure Control Intellisys Butterfly, Soft Shut, and Pendulum Valves, Controllers, Gauges and Accessories 02/21/06 1.4MB Downstream Pressure Control Foreline Traps 02/21/06 862KB Foreline Traps Chambers & Weldments 02/21/06 1.6MB Chambers & Weldments Viewports & Shutters NW, ISO, CF and ASA Viewports, Viewport Shutters, Glass Adapters 02/21/06 479KB Viewports & Shutters Sample Transfer & Manipulation Sample Transfer Systems, Load Locks, Add-A-Doors, Rotary and Linear Motion 02/21/06 1.7MB Sample Transfer & Manipulation Feedthroughs Liquid and Electrical Feedthroughs, High-Voltage Insulators 02/21/06 408KB Feedthroughs Thin Film Instrumentation Crystal Sensors, Monitors, and Feedthroughs 02/21/06 1.7MB Thin Film Instrumentation Thermal Products Heater Jackets & Insulators, Controllers and Accessories 02/21/06 1.0MB Thermal Products

Traps
We have years of experience designing and building custom foreline traps to protect pumps and eliminate buildup of condensable by-products in forelines and exhaust lines. Examples of these include water-cooled and particle traps for LPCVD, PECVD, metal CVD, MOCVD and metal etch. Others are particle traps for crystal growers, liquid traps for reclamation of photo resist and oil reclamation traps for industrial applications. Often times our customers see a 200% increase in preventative maintenance intervals after installing one of these traps.

Chambers
We have developed a reputation at national laboratories, universities and UHV equipment manufacturers for being the premier vacuum chamber fabricator. The quality, appearance and performance of our chambers are unequaled. Some of the chambers we make include load locks, sample preparation chambers, analysis chambers, monochrometers, beam line collimators, reactors and coating chambers. We frequently supply cylindrical and rectangular chambers with doors, stands and water jackets. Our engineering staff can design a chamber from customer sketches or specifications and supply complete manufacturing drawings for customer approval.

Valves
Our valves are offered with a number of options, making it easy for our customers to specify non-standard O-rings, actuators, fittings and air solenoids. We also provide customer specified valves with special port configurations, pumpouts, materials and other features.

Weld Fittings
Because we manufacture tees, elbows and other weld fittings in-house, Nor-Cal can fabricate exhaust weldments for semiconductor equipment from a single piece of tubing. Welds and other manufacturing steps are eliminated, improving cleanliness and fit while reducing cost. We have demonstrated as much as 30% savings to our customers using this technique.

Vacuum Fittings
NW, ISO, Con-Flat, metal seal, ASA vacuum fittings. Includes adaptors, flanges, seals and clamps.

Thermal Products
The experience gained designing heaters for our standard products has allowed us to provide thermal products for special applications. We have drawn from a number of heating technologies (silicon, fiberglass, cartridge, strip, band, tubular and thick film) in order to provide the most cost-effective solutions. Examples include heated traps, internal heaters for vacuum chambers, gas delivery systems and ion pump heaters.

System Integration
On request, Nor-Cal can assemble an entire system including chamber, frame, pumps, gauges, valves, manipulators and other components to customer specifications. Our vacuum technicians can complete a thorough qualification of system performance, including time to base pressure and RGA scan, before the system is back filled with nitrogen and shipped to the customer.

Comprehensive Downstream Solutions
Our experience coupled with a broad product offering allows us to integrate components, providing comprehensive solutions to semiconductor fabs and equipment manufacturers. To improve overall system performance and achieve customer defined goals, a thorough evaluation of the system is conducted. A cost of ownership model can be provided showing payback as a result of increased tool utilization and decreased planned and unplanned maintenance costs.

Foreline traps, thermal products, IntellisysTM pressure control valves, GenesisTM soft start valves and foreline weldments can be provided as turnkey foreline modules. Thermal and vacuum characterization can be performed at Nor-Cal before the assembly is supplied, leak checked, blanked off and clean room packaged.