Vacuum Equipment - Pumps |
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Equipment
Types |
Applications |
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Rotary Vane Pumps |
Two stage, Oil sealed mechanical vacuum pump (1.24 to 53 CFM) 1.0 E-04
torr. Available for corrosive applications |
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Rotary Vane Pumps |
Single stage, Oil-sealed mechanical vacuum pump (11 to 677 CFM) 0.4 to 0.075
torr. Available for corrosive applications. |
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Dry Compressing Piston Pumps |
Multi-stage, Dry Piston Pump (9.4-28 CFM) 3.00E-01 to 2.00 E-02 torr |
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Roots Blowers |
<1.0E-04
torr (Ultimate pressure depends on forevacuum pump type) 108 to 6684 CFM. Laser
applications supported. |
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Turbomolecular |
Turbopumps
with mechanical and magnetic rotor suspension. 35-2,000 l x s-1 |
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Diaphragm Pumps |
Dry
Diaphragm pump (0.4 to 2.7 CFM) 75 to <1.5 Torr |
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Oil Diffusion Pumps |
Diffusion pump rated
from 3,000 to 50,000 l x s-1 |
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Turbopump Systems |
PT turbomolecular
pumping systems are turnkey pumping packages including the turbopump, frequency converter,
backing pump, connecting piping and support stand. |
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Cryopumps |
- Semiconductor Manufacturing
- Coating Systems (Precision Coating Systems)
- Detector Cooling
- Medical Diagnostics
- Industrial Vacuum
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LT Systems |
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Equipment
Types |
Applications |
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Polycold
Refrigeration Systems |
- Metallizing
- Opthalmic Coating
- Decorative Coatings
- Anti-Reflective Coatings
- Optical Fillers
- Semiconductor Manufacturing
- Web Coating
- Vacuum Furnaces
- Hard Coatings
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Equipment
Types |
Applications |
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Oil-free pumping packages |
Our oil-free vacuum
pumps and pump packages provide rapid evacuation of chambers with volumes up to 200
liters. We have pump packages at major semiconductor, aerospace, and industrial facilities
such as NASA, Intel, Motorola, Jet Propulsion Labs, M.I.T., Lucent Technologies, IBM,
Boeing, and many others. |
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