Mass Flow Controller

Apex Gas Control
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Mass Flow Meter

Apex Mass Flow Controllers

Apex Mass Flow Controllers for vacuum and non-vacuum applications combine pinpoint accuracy with flexibility. All Apex Controllers have the flexibility to measure and control over 130 on-board gases, to choose your digital and analog input / output communication preferences, and a vast process connection selection. Additional options with aggressive gases, low pressure drop, high accuracy, and multiple valves allow the Apex Mass Flow Controller devices to be configured for any application. The ability to control up to 26 Apex devices through one RS232 or USB port, provides your set-up the ultimate in flexibility.


Vacuum Evaporation
Membrane Testing
Vacuum Sputtering
Plasma Deposition
Thin Film Coating Systems
High Temperature Furnace Gas Control
E-Beam Coating Systems
Hydrogen Fuel Cell Research
University Research
Gas Mixing

Advantages of Apex Gas and Water Flow Devices

  • Flow up to 130 different gases with 1 Apex Flow Controller or Apex Flow Meter
  • Pinpoint Flow Accuracy
  • 200 to 1 Turn-down Ratio
  • High Accuracy with error never exceeding more than 1%
  • Control up to 26 Apex devices with one Computer or PLC
  • Ultra-Fast Millisecond Response Time
  • No Warm-up Time Needed for Start-up
  • Flow Range from 0.5 sccm to 1500 slpm Full-Scale
  • The Low Cost and  High Tech Solution


Apex Mass Flow Controllers and Mass Flow Meters are in use all over the world in both Research, Analytical, and Industrial Applications. Both OEM equipment builders and some of the worlds finest researchers have already taken advantage of the technological benefits and low prices of Apex Vacuum Mass Flow Controllers, Meters, and Pressure Controllers, now it's your turn!

Additional Apex MFC Configuration Options

Apex Aggressive Gas Mass Flow Controller

The Apex Aggressive Gas Mass Flow Controller opens the door to flow control of some of the harshest applications. The Aggressive Gas Series uses alternative seals compatible with an assortment of gases that normally are problematic with the standard Viton seals. Start controlling your harsh gas applications with the Apex Aggressive Gas MFC.

Apex Low Pressure Drop Mass Flow Controller

The Apex Low Pressure Drop Mass Flow Controller allows control of gas flow even where the pressure differential is minimal or can not be disturbed. This option can reach full-scale pressure drops as low as 0.06 PSID! When you have an application where keeping the pressure differential steady is essential or there is minimal pressure to work with, the Apex Low Pressure Drop Mass Flow Controller is the MFC for you.

Apex High Accuracy Option Mass Flow Controller

The Apex High Accuracy Option for Mass Flow Controllers takes pin-point accuracy to a whole new level. If your application calls for accuracy as low as 0.2% Full Scale and 0.4% Reading, please ask for the High Accuracy Option for the Apex MFC.

Apex Bidirectional Mass Flow Controller

The Apex Bidirectional MFC is the best option for control of flow in both directions as well as in and out of a closed volume. Whether it be a vacuum chamber or high pressure chamber, the Bidirectional Mass Flow controller takes the place of a bleed valve and exhaust while maintaining precise control. Save money on gas consumption and solve tough flow applications with the Apex Bidirectional Mass Flow Controller.