Mass Flow Meters

Apex Mass Flow Meters for Gas Control
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Mass Flow Meters

Apex Mass Flow Meters

Apex Mass Flow Meters for vacuum and non-vacuum applications combine pinpoint accuracy with flexibility. All Apex Meters have the flexibility to measure over 130 on-board gases, to choose your digital and analog input / output communication preferences, and a vast process connection selection. Additional options with aggressive gases, low pressure drop, and high accuracy allow the Apex Mass Flow Meter devices to be configured for any application. The ability to measure up to 26 Apex devices through one RS232 or USB port, provides your set-up the ultimate in flexibility.

Our accuracy of 0.8% direct reading plus 0.2% full scale make the Apex Mass Flow Meters the leader in flexibility and accuracy. High accuracy calibrations provide even better accuracy by lowering the direct reading potion of the error from 0.8% to 0.4%.


Vacuum Evaporation
Membrane Testing
Vacuum Sputtering
Plasma Deposition
Thin Film Coating Systems
High Temperature Furnace Gas Measurement
E-Beam Coating Systems
Hydrogen Fuel Cell Research
University Research
Gas Mixing

Advantages of Apex Gas and Water Flow Devices

  • Flow up to 130 different gases with 1 Apex Flow Meter
  • Pinpoint Flow Accuracy
  • 200 to 1 Turn-down Ratio
  • High Accuracy with error never exceeding more than 1%
  • Control up to 26 Apex devices with one Computer or PLC
  • Ultra-Fast Millisecond Response Time
  • No Warm-up Time Needed for Start-up
  • Flow Range from 0.5 sccm to 1500 slpm Full-Scale
  • The Low Cost and  High Tech Solution


Apex Mass Flow Controllers and Mass Flow Meters are in use all over the world in both Research, Analytical, and Industrial Applications. Both OEM equipment builders and some of the worlds finest researchers have already taken advantage of the technological benefits and low prices of Apex Vacuum Mass Flow Controllers, Meters, and Pressure Controllers, now it's your turn!

Additional Apex MFC Configuration Options

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Apex Battery Powered Mass Flow Meter

The Apex Battery Powered MFM takes precise gas flow measurement and makes it portable! Do you have multiple systems that need occasional measurement, a tool for in the field gas flow measurement, or just want the ability to connect your Mass Flow Controller into multiple test ports on a system? If you said yes to any of these, then the Apex Battery Powered Mass Flow Meter is the perfect gas flow measurement device for you.

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Apex Aggressive Gas Mass Flow Meter

The Apex Aggressive Gas Mass Flow Meter opens the door to flow measurement of some of the harshest applications. The Aggressive Gas Series uses alternative seals compatible with an assortment of gases that normally are problematic with the standard Viton seals. Start measuring your harsh gas applications with the Apex Aggressive Gas MFM.

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Apex Low Pressure Drop Mass Flow Meter

The Apex Low Pressure Drop Mass Flow Meter allows measurement of gas flow even where the pressure differential is minimal or can not be disturbed. This option can reach full-scale pressure drops as low as 0.06 PSID! When you have an application where keeping the pressure differential steady is essential or there is minimal pressure to work with, the Apex Low Pressure Drop Mass Flow Meter is the MFM for you.

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Apex High Accuracy Option Mass Flow Meter

The Apex High Accuracy Option for Mass Flow Meters takes pin-point accuracy to a whole new level. If your application calls for accuracy as low as 0.2% Full Scale and 0.4% Reading, please ask for the High Accuracy Option for the Apex MFM.