HVA Gate Valves

Precision High- and Ultra-High Vacuum Isolation Valves

HVA gate valves (High Vacuum Apparatus) are industry-proven high- and ultra-high vacuum (HV/UHV) isolation valves engineered for clean, reliable, and leak-tight performance in demanding vacuum environments. Designed and manufactured in the USA, HVA gate valves are widely used in semiconductor manufacturing, thin-film deposition, research laboratories, vacuum coating systems, and advanced industrial processes.

Why Choose HVA Gate Valves?

HVA gate valves are trusted worldwide for applications where vacuum integrity, durability, and repeatability are critical.

Key advantages include:

• Excellent leak-tight isolation for HV and UHV systems

• Low outgassing materials and clean internal geometries

• Robust construction for long service life

• Manual and pneumatic actuation options

• Broad range of sizes, flanges, and configurations

HVA Gate Valve Types

Manual Gate Valves

Manually operated HVA gate valves provide reliable vacuum isolation using a handwheel or lever mechanism.

Features:

• Simple, dependable operation

• Ideal for laboratory and R&D systems

• Stainless steel or aluminum construction

• Available in KF/NW, ISO-F, ISO-K, ASA, and CF flanges

Pneumatic Gate Valves

HVA pneumatic gate valves enable automated control and integration into process tools.

Features:

• Air-actuated open/close operation

• Fast response and repeatable positioning

• Compatible with PLC and tool automation

• Optional position indicators and solenoids

Ideal for:
Semiconductor tools, production vacuum systems, and load-lock isolation.

Rectangular & Slit Valves

HVA also offers rectangular and slit-style gate valves for large-area or non-circular vacuum openings.

Applications include:

• Load locks

• Transfer chambers

• Display and coating systems

Materials & Vacuum Performance

HVA gate valves are engineered using low-outgassing materials and precision machining to support high and ultra-high vacuum environments.

Typical specifications:

• Vacuum range: High vacuum to ultra-high vacuum

• Low helium leak rates

• Bakeable designs (model-dependent)

• Metal or elastomer sealing options (Viton® commonly available)

Flange & Size Options

HVA gate valves are available in a wide range of standard vacuum flange types, including:

• KF / NW

• ISO-K and ISO-F

• ASA

• CF (ConFlat®)

Sizes range from small laboratory valves to large-format production valves, allowing easy integration into new or existing vacuum systems.

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11000 Series
Stainless Steel
Gate Valve

The KF, ISO-F, and ISO-K Flanged 11000 Series Standard Cycle Gate Valves are vacuum valves designed for high vacuum applications. They provide isolation valving for high vacuum pumps including Cryopumps, Turbo Pumps, Ion Pumps, and other applications requiring clean, low outgassing valves.

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11000 Series
Stainless Steel
Gate Valve

The CF Flanged 11000 Series Standard Cycle Gate Valves are vacuum valves designed for high vacuum and ultra-high vacuum applications. They provide isolation valving for high vacuum pumps including Cryopumps, Turbo Pumps, Ion Pumps, and other applications requiring clean, low outgassing valves.

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21200 Series
Stainless Steel
Viton Seal
Million Cycle
Gate Valve

The Million Cycle Gate Valves Series are vacuum valves designed for high vacuum applications when pressure ranges approximate 1 x 10-9 mbar and bakeout temperatures do not exceed 150°C. There are no mechanical locks inside the vacuum, which is extremely beneficial for semiconductor and sensitive processes requiring vibration-free operation. All moving joints have hardened shafts, reducing particulate generation and providing smoother actuation. These valves provide valving for Cryopumps, Turbo Pumps, Ion Pumps, and other applications requiring clean, high cycle, low outgassing valves.

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11000 Series
Stainless Steel
Viton Seal
3-Position

The 3-Position Gate Valves are designed for use in etching, CVD, and any other process that requires pressure control. When used in conjunction with upstream mass flow controllers, this series valve has exceptional pressure control capability. The valves employ two pneumatic solenoids and an air pressure regulator to achieve three positions: fully-open, fully-closed, and an adjustable third position. The first solenoid controls the fully-open, fully-closed positions while a second solenoid controls the third position.

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