Mass Flow Controller

Mass Flow Meter

Apex Mass Flow Controller

Apex Mass Flow Controllers for vacuum and non-vacuum applications combine pinpoint accuracy with flexibility. All Apex Controllers have the ability to measure and control over 130 on-board gases, choose your digital and analog input / output communication preferences, and contain vast process connection selection. Additional options with aggressive gases, low pressure drop, high accuracy, and multiple valves allow the Apex Mass Flow Controller devices to be configured for any application. In addition, the ability to control up to 26 Apex devices through one RS232 or USB port provides your set-up the ultimate in convenience and flexibility.


Vacuum Evaporation
Membrane Testing
Vacuum Sputtering
Plasma Deposition
Thin Film Coating Systems
High Temperature Furnace Gas Control
E-Beam Coating Systems
Hydrogen Fuel Cell Research
University Research
Gas Mixing

Advantages of Apex Mass Flow Controllers

  • Flow up to 130 different gases with 1 Apex Flow Controller or Apex Flow Meter
  • Pinpoint Flow Accuracy
  • 200 to 1 Turn-down Ratio
  • High Accuracy option available
  • Control up to 26 Apex devices with one Computer or PLC
  • Ultra-Fast Millisecond Response Time
  • No Warm-up Time Needed for Start-up
  • Flow Range from 0.5 sccm to 1500 slpm Full-Scale
  • The Low Cost and High Tech Solution

Apex Mass Flow Controllers and Mass Flow Meters are used all over the world in both Research, Analytical, and Industrial Applications. Both OEM equipment builders and some of the world's finest researchers have already taken advantage of the technological benefits and low prices of Apex Vacuum Mass Flow Controllers, Meters, and Pressure Controllers. Now it's your turn!

Types of Apex Mass Flow Controllers

Standard, Aggressive and Low Pressure Drop Models

Vacuum MFC

Apex MFC for Vacuum

Apex Mass Flow Controller 

Our Apex Mass Flow Controller is standard for most applications, either vacuum or pressure. We offer the most accurate and fastest to set-point of any MFC on the market for the price. Options to customize your mass flow controller for your specific application are numerous and include such options as high calibration, totalizer function, and custom VCR gas fittings. Our on-board controller allows you to set our MFC without expensive rack mount control boxes. Using our PID parameters, you can further customize the speed and update times to better meet your application needs.

Apex Mass Flow Controller for Vacuum Applications

Our vacuum series Apex Mass Flow Controller is designed for new and retro-fit vacuum applications. Replacing existing thermal mass flow controllers with Apex's MFC is comparable in form, fit and function. Our enclosed valve design and fittings conforms to SEMI International Standards. Contact us to discuss how to switch to our multi-gas drop in replacement mass flow controllers. Gas connections are VCR.

Apex Aggressive Gas Mass Flow Controller

The Apex Aggressive Gas Mass Flow Controller opens the door to flow control for some of the harshest applications. Gases include ammonia, butylene, chlorine, dimeth ylether, hydrogen sulfide, silane and others. The Aggressive Gas Series uses alternative seals compatible with these and other aggressive/corrosive gases that normally pose problems with the standard Viton seals. Each Aggressive Gas Apex MFC comes with all inert and other gases in the library. Output connectors can be the standard NPT or welded VCR. 

Apex Low Pressure Drop Mass Flow Controller

The Apex Low Pressure Drop Mass Flow Controller allows control of gas flow even where the pressure differential is minimal or can not be disturbed. This option can reach full-scale pressure drops as low as 0.06 PSID! When you have an application where keeping the pressure differential steady is essential or there is minimal pressure to work with, the Apex Low Pressure Drop Mass Flow Controller is the MFC for you.

Apex Bidirectional Mass Flow Controller

The Apex Bidirectional MFC is the best option for control of flow in both directions as well as in and out of a closed volume. Whether it be a vacuum chamber or high pressure chamber, the Bidirectional Mass Flow controller takes the place of a bleed valve and exhaust, all while maintaining precise control. Save money on gas consumption and solve tough flow applications with the Apex Bidirectional Mass Flow Controller.