Turbovac Molecular High Vacuum Pumps

Applications:
- Analytical High Vacuum Applications
- Helium Leak Checking
- Mass Spectrometers
- Load Locks
- High Vacuum Laboratory Applications
- Optical Coating
- Degassing
- Data Storage
- UHV Vacuum Systems
- Semiconductor Tools
- Vacuum Furnaces
The TURBOVAC turbomolecular vacuum pumps with mechanical rotor suspension are durable robust turbo pumps in the pressure range from 10-1 mbar (0.75 x 10-1 Torr) to 10-10 mbar (0.75 x 10-1 Torr). Pumping speeds for air range from 35 l/s to 2400 l/s. TURBOVAC Turbo Pumps employ a compact design, the reliable ceramics ball bearings and the simplicity of design and operation. This Classic Oerlikon Leybold turbo pump product is perfect for many high vacuum applications.
The Turbovac i series provides on-board electronics and the latest in communication interfaces (RS 485, USB, 15 pin digital I/O in addition to the best in class technical specifications.
Two Series of Turbo Pumps
Turbovac i Series - 350 l/s and 450 l/s models - Integrated electronics on pump for compact design. Great light gas pumping speed and 100x improvement in pumping compression ratio.
Turbovac i Series- Best in Class Light Gases Pump Speed & 100x compression ratio improvement
The Turbovac i Series offers the best in class performance featuring cutting edge rotor and drag stage design providing high performance. Performance in compression ratio is 100x previous models.
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Price & Performance- Best in Class Performance for Light Gases -aggressively priced
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Plug & Play- Integrated Controller Electronics- for easy installation, operation & control
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Fit & Forget - Innovative bearing and Pump Design- for superior long-term performance
"Compression Ratio” is the ratio between foreline (partial) pressure and inlet (partial) pressure for a given process gas, measured in “zero flow” conditions (performed by injecting the process gas in the pump foreline while the high vacuum port is blanked off).

Turbovac Classic Series - Proven, durable turbo pump designs from 50 l/s up to 1600 l/s models. These turbo pumps are known for their low cost robust performance. The Turbovac Classic Series are the best pumping performance for the money available.