TURBO MOLECULAR PUMP- CERAMIC BEARINGS-1

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Turbovac Molecular High Vacuum Pumps 

Trivac Series Dual Stage Rotary Vane Vacuum Pumps

Applications:

  • Analytical High Vacuum Applications
  • Helium Leak Checking
  • Mass Spectrometers
  • Load Locks
  • High Vacuum Laboratory Applications
  • Optical Coating
  • Degassing
  • Data Storage
  • UHV Vacuum Systems
  • Semiconductor Tools
  • Vacuum Furnaces 

The TURBOVAC turbomolecular vacuum pumps with mechanical rotor suspension are durable robust turbo pumps in the pressure range from 10-1 mbar (0.75 x 10-1 Torr) to 10-10 mbar (0.75 x 10-1 Torr). Pumping speeds for air range from 35 l/s to 2400 l/s. TURBOVAC Turbo Pumps employ a compact design, the reliable ceramics ball bearings and the simplicity of design and operation. This Classic Oerlikon Leybold turbo pump product is perfect for many high vacuum applications.

The Turbovac i series provides on-board electronics and the latest in communication interfaces (RS 485, USB, 15 pin digital I/O in addition to the best in class technical specifications. 

 

Two Series of Turbo Pumps 

Turbovac i Series - 350 l/s and 450 l/s models - Integrated electronics on pump for compact design. Great light gas pumping speed and 100x improvement in pumping compression ratio.

Turbovac i Series- Best in Class Light Gases Pump Speed & 100x compression ratio improvement

The Turbovac i Series offers the best in class performance featuring cutting edge rotor and drag stage design providing high performance. Performance in compression ratio is 100x previous models.

  • Price & Performance- Best in Class Performance for Light Gases -aggressively priced

  • Plug & Play- Integrated Controller Electronics- for easy installation, operation & control

  • Fit & Forget - Innovative bearing and Pump Design- for superior long-term performance

"Compression Ratio” is the ratio between foreline (partial) pressure and inlet (partial) pressure for a given process gas, measured in “zero flow” conditions (performed by injecting the process gas in the pump foreline while the high vacuum port is blanked off).

Turbovac i Series Turbomolecular High Vacuum Pump

Turbovac Classic Series - Proven, durable turbo pump designs from 50 l/s up to 1600 l/s models. These turbo pumps are known for their low cost robust performance. The Turbovac Classic Series are the best pumping performance for the money available.