Vacuum Valves
Right Angle Valves
Vacuum Gate Valves
Vacuum Ball Valves
Vacuum Valves for rough, high vacuum and ultra-high vacuum applications
High Vacuum Gate Valves
High vacuum gate valves provide isolation for high vacuum pumps, such as turbo pumps, ion pumps or cry-pumps. Gate Valves are provided in manual and pneumatic designs as well as for clean and low outgassing high vacuum applications. Flanges can be either NW, ISO or CF. Three position gate valves are available for pressure control process steps.
Ultra-High Vacuum Gate Valves
Ultra-High Vacuum (UHV) gate valves provide low outgassing isolation for applications needing ultra-high vacuum or vacuum bake-out. CF Flanged gate valves use a knife edge seal with copper gaskets bonnet seal. Both manual and pneumatic designs are available. Bake-out temperatures can be as high as 200C with the valve open and 150C with the valve closed.
Right Angle Valves
Right angle or poppet vacuum valves provide vacuum isolation of vacuum systems. In addition, right angle valves provide isolation of roughing pumps from the vacuum system. Flanges for these valves can be tube end, NW, ISO or CF. Right angle valves are available in either manual or pneumatic applications. Valves can be provided with or without solenoids.
Links to Apex Science Online Store
________________________________________________________________________________________________________________________________________________________________________________
Right Angle,
In-line Valves
Poppet Valves
No Flanges
NW Valves
________________________________________________________________________________________________________________________________________________________________________________
11000 Series
Stainless Steel
Gate Valve
The KF, ISO-F and ISO-K flanged 11000 Series Standard Cycle Gate Valves are vacuum valves designed for high vacuum applications. These valves provide isolation valving for high vacuum pumps including cryopumps, turbo pumps, ion pumps and other applications requiring clean, low outgassing valves.
________________________________________________________________________________________________________________________________________________________________________________
________________________________________________________________________________________________________________________________________________________________________________
11000 Series
Stainless Steel
Gate Valve
The CF flanged 11000 Series Standard Cycle Gate Valves are vacuum valves designed for high vacuum and ultra-high vacuum applications. These valves provide isolation valving for high vacuum pumps including cryopumps, turbo pumps, ion pumps and other applications requiring clean, low outgassing valves.
________________________________________________________________________________________________________________________________________________________________________________
________________________________________________________________________________________________________________________________________________________________________________
21200 Series
Stainless Steel
Viton Seal
Million Cycle
Gate Valve
The Million Cycle Gate Valves Series are vacuum valves designed for high vacuum applications when pressure ranges approximate 1 x 10-9 mbar and bakeout temperatures do not exceed 150°C. There are no mechanical locks inside the vacuum, which is extremely beneficial for semiconductor and sensitive processes requiring vibration-free operation. All moving joints have hardened shafts, reducing particulate generation and providing smoother actuation. These valves provide valving for cryopumps, turbo pumps, ion pumps and other applications requiring clean, high cycle, low outgassing valves.
Viton Sealing O-Ring Bonnet and Gate
Pneumatic Operation
________________________________________________________________________________________________________________________________________________________________________________
11000 Series
Stainless Steel
Viton Seal
3-Position
The 3-Position Gate Valves are designed for use in etching, CVD and any other process that requires pressure control. When used in conjunction with upstream mass flow controllers, this series valve will contribute to an exceptional pressure control capability. The valves employ two pneumatic solenoids and an air pressure regulator to achieve the three positions of fully open, fully closed and an adjustable third position. One solenoid controls the fully open and fully closed positions while a second solenoid controls the third position.
Viton Sealing O-Ring Bonnet and Gate
Pneumatic Operation
________________________________________________________________________________________________________________________________________________________________________________
