RF Power

RF Powered Plasma

Generators and Matches

Plasma Processes

DC Power Supplies

DC Pulsed Power

Thermal Detection

RF Power Supply

RF Match Networks

Advanced Energy manufactures RF Power Supplies for all power levels for solar, vacuum coating and semiconductor applicarions. Advanced Energy manufactures RF Generators optimizes film and throughput with unprecedented power accuracy.

RF Sputtering is used in PECVD, Oxide, Poly and Metal Etch-AE’s RF power products have been used in varied manufacturing markets, including: 

  • Semiconductor (copper, aluminum, tantalum, titanium, and newer exotic materials) 
  • Flat panel display (thin-film transistor, color filter, organic LEDs) 
  • Data storage (optical storage, magnetic storage, and combinations of magneto-optical storage) 
  • Solar photovoltaic cell (transparent conductive oxides and Si deposition) 
  • Architectural glass 
  • Advanced product applications (thin films for optics, tool coating, plastics, etc.)

Paramount RF Power Delivery Systems

Paramount  3 Kw RF Power Supplies 13.56 fixed or variable into a 50 Ω and non-50 Ω loads. The Paramount enables the next generation of etch and deposition processes with faster process transitions. Your generator to maximize yield and ROI.

Apex RF Power- Delivery Systems

The Apex Series RF Plasma Generators provides a modular design utilizing a suitable chamber mounting capability. The Apex Series provides sophisticated RF-Conversion Technology to offer enhanced product and process reliability.

HFV Variable Frequency 2 MHz Generators

The HPV Variable Frequency RF Power Generator is mainly used for 200mm and 300mm wafer processing for flat panel display. This versatile power generators features include digitally synthesized variable-frequency output and microprocessor control, with output power levels of 5 and 8 kW. In addition, it delivers an output frequency range of 1.765 to 2.165 MHz.

Cesar RF Power Supplies

Cesar RF is a versatile RF Generator consistent RF power-delivery performance, as well as a diverse selection of models, each with a unique set of features and capabilities (2, 4, 13.56, 27.12, and 40.68 MHz; 0.3 to 5 kW; with a variety of user interfaces and input options).

HiLight RF Generators

Compact, lightweight and air-cooled, the 13.56MHz, 600 W HiLight Plasma Generator is the robust choice for low power on-board applications. HiLight Generators are CE compliant and controlled via a 25 pin user port.

Integro RF Generators

The Integro is the economical choice that combines a 13.56MHz 600W Plasma Generator with an auto matching network in a single compact package.

Ovation VHF Power- Delivery Systems

The Ovation fully-integrated, power delivery system enables faster, higher-precision processes, such as those required for demanding narrow-linewidth, dielectric etch processes, through the implementation of a unique power delivery scheme. It is the first to accurately deliver power into a non-50-ohm environment without an external sensor, reacting faster than traditional power supplies.

Navigator Digital Matching Network

The Navigator Digital Matching Network provides reliable matching over load impedances of 15W to 30kW. Equipped with microprocessor-controlled stepper motor circuitry and digital, user-selectable tuning algorithms, it provides greater consistency and accuracy than traditional analog-based tuning methods. This enables it to optimize delivered process power to semiconductor, solar, FPD, and MEMs manufacturing processes, including etch, CVD, HDP-CVD, PVD, and chamber clean applications.

VarioMatch Automatic Matching Networks

The VarioMatch’s high tuning accuracy and speed enable consistant power across a wide range of plasma load conditions (600 W to 5 kW, 2 to 40.68 MHz). VarioMatch Networks are easy to operate and integrate with any existing system.

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