This diffusion pump heater selector guide contains the heating elements in common vacuum diffusion pumps. Manufacturers included are Varian (now called Agilent), Leybold Vacuum, Edwards Vacuum, Veeco, and CVC. Types of heaters are cartridge or platen.
To use the guide follow the manufacturer name, type pump, pump size to find our replacement part number and number of heaters needed per pump. For more information, call us a 800-331-2808.
| Heater Replacement Guide: VARIAN / NRC | |||||||
|
PUMP
SIZE |
PUMP
MODEL |
Heaters
per Pump |
Electrical Rating
|
VARIAN/NRC
HEATER NO. |
DALTON
PART NO. |
HEATER
TYPE |
|
|
WATTS
|
VOLTS
|
||||||
|
2"
|
HSA
|
1
|
350W
|
120V
|
0181-6473-01-100
|
W5C030-0117
|
CARTR.
|
|
2"
|
HS-2
|
1
|
450W
|
120V
|
0181-6473-02-125
|
W5C033-0118
|
CARTR.
|
|
2"
|
M-2
|
1
|
450W
|
120V
|
0181-6472-03-120
|
4/512-2/9D
|
PLATEN
|
|
4"
|
H4X,
VHS-4 |
1
|
1450W
|
120V
|
0181-6473-04-205
|
1512-4/9D
|
PLATEN
|
|
4"
|
H4X,
VHS-4 |
1
|
1450W
|
208V
|
0181-6473-210
|
1521-4/9D
|
PLATEN
|
|
4"
|
H4X,
VHS-4 |
1
|
1450W
|
240V
|
0181-6473-04-250
|
1524-4/9D
|
PLATEN
|
|
4"
|
M-4,
NHS-4 |
1
|
1190W
|
120
|
0181-6473-04-100
|
1212-4/9D
|
PLATEN
|
|
4"
|
M-4,
NHS-4 |
1
|
1190W
|
240
|
0181-6473-04-200
|
1224-4/9D
|
PLATEN
|
|
4"
|
VARIOUS
|
1
|
AS REQUIRED
|
--
|
CUSTOM 4/9D
|
PLATEN
|
|
|
4"
|
HS4/0161
|
1
|
1000W
|
120V
|
0181-6473-04-004
|
1012-5/D
|
PLATEN
|
|
4"
|
VARIOUS
|
1
|
AS REQUIRED
|
--
|
CUSTOM 5D
|
PLATEN
|
|
|
6"
|
VHS-6,
VS250 |
1
|
2200W
|
120V
|
0181-6473-06-125
|
2212-6D
|
PLATEN
|
|
6"
|
VHS-6,
VHS250 |
1
|
2200W
|
208V
|
0181-6473-06-175
|
2221-6D
|
PLATEN
|
|
6"
|
VHS-6,
VHS250 |
1
|
2200W
|
240V
|
0181-6473-06-225
|
2224-6D
|
PLATEN
|
|
6"
|
VHS-6,
VHS250 |
1
|
2200W
|
480V
|
NOT LISTED
|
2248-6D
|
PLATEN
|
|
6"
|
M-6,
NHS-6 |
1
|
1785W
|
120V
|
0181-6473-06-100
|
1812-6D
|
PLATEN
|
|
6"
|
M-6,
NHS-6 |
1
|
1500W
|
208V
|
0181-6473-06-150
|
1521-6D
|
PLATEN
|
|
6"
|
M-6,
NHS-6 |
1
|
1785W
|
240V
|
0181-6473-06-200
|
1824-6D
|
PLATEN
|
|
6"
|
VARIOUS
|
1
|
AS REQUIRED
|
CUSTOM 6D
|
PLATEN
|
||
|
6"
|
HS6/0162
|
1
|
1800W
|
120V
|
0181-6473-01-005
|
1812-7D
|
PLATEN
|
|
6"
|
HS6/0162
|
1
|
1800W
|
240V
|
0181-6473-01-006
|
1824-7D
|
PLATEN
|
|
6"
|
VARIOUS
|
1
|
AS REQUIRED
|
CUSTOM 7D
|
PLATEN
|
||
|
10"
|
HS-10
|
1
|
3900W
|
208V
|
NOT LISTED
|
3921-11D
|
PLATEN
|
|
10"
|
HS-10
|
1
|
3900W
|
240V
|
NOT LISTED
|
3924-11D
|
PLATEN
|
|
10"
|
HS-10
|
1
|
3900W
|
480V
|
NOT LISTED
|
3948-11D
|
PLATEN
|
|
10"
|
HS-10
|
1
|
3300W
|
480V
|
0180-6473-10-230
|
3348-11D
|
PLATEN
|
|
10"
|
VARIOUS
|
1
|
AS REQUIRED
|
CUSTOM-11D
|
PLATEN
|
||
|
10"
|
VHS-10, VHS400
|
1
|
5000W
|
208V
|
NOT LISTED
|
5021-12D
|
PLATEN
|
|
10"
|
VHS-10, VHS400
|
1
|
5000W
|
240V
|
NOT LISTED
|
5024-12D
|
PLATEN
|
|
10"
|
VHS-10, VHS400
|
1
|
5000W
|
480V
|
NOT LISTED
|
5048-12D
|
PLATEN
|
|
10"
|
VHS-10, VHS400
|
1
|
4400W
|
208V
|
0181-6473-10-140 (x2)
|
4421-12D
|
PLATEN
|
|
10"
|
VHS-10, VHS400
|
1
|
4400W
|
240V
|
0181-6473-10-150 (x2)
|
4424-12D
|
PLATEN
|
|
10"
|
VHS-10, VHS400
|
1
|
4400W
|
480V
|
0181-6473-10-170 (x2)
|
4448-12D
|
PLATEN
|
|
10"
|
VARIOUS
|
1
|
AS REQUIRED
|
CUSTOM 12D
|
PLATEN
|
||
|
16"
|
HS-16
|
3
|
3200W
|
240V
|
NOT LISTED
|
3224-8R
|
PLATEN
|
|
16"
|
HS-16
|
3
|
3200W
|
480V
|
NOT LISTED
|
3248-8R
|
PLATEN
|
|
16"
|
HS-16
|
3
|
2700W
|
240V
|
0181-6473-16-035
|
2724-8R
|
PLATEN
|
|
16"
|
HS-16
|
3
|
2700W
|
480V
|
0181-6473-16-045
|
2748-8R
|
PLATEN
|
|
16"
|
VARIOUS
|
3
|
AS REQUIRED
|
CUSTOM 8R
|
PLATEN
|
||
|
20"
|
HS-20
|
6
|
2400W
|
240V
|
NOT LISTED
|
2424-10R
|
PLATEN
|
|
20"
|
HS-20
|
6
|
2400W
|
480V
|
NOT LISTED
|
2448-10R
|
PLATEN
|
|
20"
|
HS-20
|
6
|
2000W
|
240V
|
0181-6473-20-060
|
2024-10R
|
PLATEN
|
|
20"
|
HS-20
|
6
|
2000W
|
480V
|
0181-6473-20-070
|
2048-10R
|
PLATEN
|
|
20"
|
HS-20
|
6
|
AS REQUIRED
|
CUSTOM 10R
|
PLATEN
|
||
|
32"
|
HS-32
|
6
|
4000W
|
240V
|
0181-6473-32-075
|
4024-14R
|
PLATEN
|
|
32"
|
HS-32
|
6
|
4000W
|
480V
|
0181-6473-32-075
|
4048-14R
|
PLATEN
|
|
32"
|
VARIOUS
|
6
|
AS REQUIRED
|
CUSTOM 14R
|
PLATEN
|
||
|
35"
|
NHS-35
|
6
|
4000W
|
240V
|
0181-6472-35-248
|
4024-16/8R
|
PLATEN
|
|
35"
|
NHS-35
|
6
|
4000W
|
480V
|
0181-6472-35-248
|
4048-16/8R
|
PLATEN
|
|
35"
|
VARIOUS
|
6
|
AS REQUIRED
|
CUSTOM16/8R
|
PLATEN
|
||
| eater Replacement Guide: Leybold Vacuum Diffusion Pumps | |||||||
|
PUMP
SIZE |
PUMP
MODEL |
Heaters
per Pump |
Electrical Rating
|
LEYBOLD
PART NO. |
DALTON
PART NO. |
HEATER
TYPE |
|
|
WATTS
|
VOLTS
|
||||||
|
10"
|
DIP 3 000
|
2
|
1250W
|
230V
|
200 05 457
|
D9C200-2762
|
CARTRIDGE
|
|
16"
|
DIP 8 000
|
6
|
800W
|
230V
|
200 05 458
|
D9C200-2761
|
CARTRIDGE
|
|
20"
|
DIP 12 000
|
9
|
800W
|
230V
|
200 05 458
|
D9C200-2761
|
CARTRIDGE
|
|
26"
|
DIP 20 000
|
12
|
1000W
|
230V
|
200 05 459
|
D9C200-2760
|
CARTRIDGE
|
|
32"
|
DIP 30 000
|
18
|
1000W
|
230V
|
200 05 459
|
D9C200-2760
|
CARTRIDGE
|
|
39"
|
DIP 50 000
|
24
|
1000W
|
230V
|
200 05 459
|
D9C200-2760
|
CARTRIDGE
|
| Heater Replacement Guide: EDWARDS HIGH VACUUM | |||||||
|
PUMP
SIZE |
PUMP
MODEL |
Heaters
per Pump |
Electrical Rating
|
EDWARDS HEATER NO.
|
DALTON
PART NO. |
HEATER
TYPE |
|
|
WATTS
|
VOLTS
|
||||||
|
4"
|
SI100
|
1
|
250W
|
120V
|
D5C067-2563
|
CARTRIDGE
|
|
|
4"
|
E04
|
1
|
850W
|
120V
|
H017-00-140
|
8/512-4D
|
PLATEN
|
|
4"
|
E04
|
1
|
850W
|
240V
|
H017-00-137
|
8/524-4D
|
PLATEN
|
|
6"
|
E06
|
1
|
1350W
|
120V
|
H017-00-59 & 102
|
1412-4/9D
|
PLATEN
|
|
6"
|
E06
|
1
|
1350W
|
240V
|
H017-00-54 & 113
|
1424-4/9D
|
PLATEN
|
|
9"
|
E09
|
1
|
2250W
|
120V
|
H017-00-161 & 132
|
2312-6/9D
|
PLATEN
|
|
9"
|
E09
|
1
|
2250W
|
240V
|
H017-00-158 & 137
|
2324-6/9D
|
PLATEN
|
|
10"
|
HT10
|
3
|
1700W
|
220V
|
26906-016
|
1722-6DE
|
PLATEN
|
|
10"
|
HT10
|
3
|
1700W
|
460V
|
26906-013
|
1746-6DE
|
PLATEN
|
|
12"
|
E012
|
3
|
1600W
|
120V
|
H017-00-181 & 102
|
1612-6E
|
PLATEN
|
|
12"
|
E012
|
3
|
1600W
|
240V
|
H017-00-179 & 113
|
1624-6E
|
PLATEN
|
|
16"
|
HT16
|
6
|
1500W
|
220V
|
26906-023
|
1522-6DE
|
PLATEN
|
|
16"
|
HT16
|
6
|
1500W
|
460V
|
26906-019
|
1546-6DE
|
PLATEN
|
|
18"
|
18B4
|
3
|
2000W
|
220V
|
26906-026
|
2022-6DE
|
PLATEN
|
|
18"
|
18B4
|
3
|
2000W
|
460V
|
26906-030
|
2046-6DE
|
PLATEN
|
|
20"
|
HT20
|
6
|
2100W
|
220V
|
26906-033
|
2122-10RE
|
PLATEN
|
|
20"
|
HT20
|
6
|
2100W
|
460V
|
26906-037
|
2146-10RE
|
PLATEN
|
| Heater Replacement Guide: VEECO Vacuum Diffusion Pumps | |||||||
|
PUMP
SIZE |
PUMP
MODEL |
Heaters
per Pump |
Electrical Rating
|
VEECO
HEATER NO. |
DALTON
PART NO. |
HEATER
TYPE |
|
|
WATTS
|
VOLTS
|
||||||
|
3"
|
300 Series
|
1
|
350W
|
115V
|
1180-030-00
|
3/512-3/3D
|
PLATEN
|
|
6"
|
7700 Series
|
1
|
1800W
|
208V
|
1180-220-00
|
1821-6D
|
PLATEN
|
|
6"
|
7760 Series
|
1
|
1800W
|
208V
|
1180-220-00
|
1821-6D
|
PLATEN
|
|
10"
|
747 Series
|
1
|
1800W
|
208V
|
1180-220-00
|
1821-6D
|
PLATEN
|
| Heater Replacement Guide: CVC Products | |||||||
|
PUMP
SIZE |
PUMP
MODEL |
Heaters
per Pump |
Electrical Rating
|
CVC PRODUCTS
PART NO. |
DALTON
PART NO. |
HEATER
TYPE |
|
|
WATTS
|
VOLTS
|
||||||
|
2"
|
PMC-2
|
1
|
300W
|
115V
|
65192
|
W3C040-0111
|
CARTRIDGE
|
|
2"
|
PMC-2
|
1
|
300W
|
208V
|
65192-2
|
W3C040-0110
|
CARTRIDGE
|
|
2"
|
PMC-2
|
1
|
300W
|
230V
|
65192-1
|
W3C040-0113
|
CARTRIDGE
|
|
2"
|
KS-200
|
1
|
500W
|
115V
|
51832
|
W4C044-0115
|
CARTRIDGE
|
|
4"
|
PMC-4
|
4
|
300W
|
115V
|
65192
|
W3C040-0111
|
CARTRIDGE
|
|
4"
|
PMC-4
|
4
|
300W
|
208V
|
65192-2
|
W3C040-0110
|
CARTRIDGE
|
|
4"
|
PMC-4
|
4
|
300W
|
230V
|
65192-1
|
W3C040-0113
|
CARTRIDGE
|
|
6"
|
PMC-6
|
6
|
300W
|
115V
|
65192
|
W3C040-0111
|
CARTRIDGE
|
|
6"
|
PMC-6
|
6
|
300W
|
208V
|
65192-2
|
W3C040-0110
|
CARTRIDGE
|
|
6"
|
PMC-6
|
6
|
300W
|
230V
|
65192-1
|
W3C040-0113
|
CARTRIDGE
|
|
6"
|
PVMS-10
|
1
|
2200W
|
230V
|
285801-2
|
2223-6/5D
|
PLATEN
|
|
10"
|
PMC-10
|
18
|
250W
|
208V
|
270819-0002
|
W3C034-0114
|
CARTRIDGE
|
|
10"
|
PMC-10
|
18
|
250W
|
230V
|
270819
|
W3C034-0112
|
CARTRIDGE
|
|
10"
|
PVMS-11, -12
|
1
|
5000W
|
230V
|
281463-1
|
5023-10/9D
|
PLATEN
|
|
10"
|
PVMS-11, -12
|
1
|
5000W
|
460V
|
281463-2
|
5046-10/9D
|
PLATEN
|
|
16"
|
PVM-16
|
6
|
1600W
|
230V
|
281760-2
|
1623-8/2R
|
PLATEN
|
|
20"
|
PVM-20
|
36
|
350W
|
115V
|
5507892-0001
|
3/512-2/9D
|
PLATEN
|
|
20"
|
PMC-20C
|
INNER
|
4310W
|
230V
|
269933-1
|
4323-12/3RI
|
RING
|
|
20"
|
PMC-20C
|
INNER
|
4310W
|
460V
|
269933-3/5
|
4346-12/3RI
|
RING
|
|
20"
|
PMC-20C
|
OUTER
|
6690W
|
230V
|
269933-2
|
6723-17/7RI
|
RING
|
|
20"
|
PMC-20C
|
OUTER
|
6690W
|
460V
|
269933-4/6
|
6746-17/7RI
|
RING
|
|
32"
|
PVM-32
|
30
|
750W
|
115V
|
279503-0001
|
7/512 -4/9D
|
PLATEN
|
|
32"
|
PVM-32
|
30
|
750W
|
230V
|
279503-0002
|
7/523 -4/9D
|
PLATEN
|
|
35", 48"
|
PMC-32C, -48C
|
INNER
|
8930W
|
230V
|
269217-5
|
8923-23/9RI
|
RING
|
|
35", 48"
|
PMC-32C, -48C
|
INNER
|
8930W
|
460V
|
269217-1/3
|
8946-23/9RI
|
RING
|
|
35", 48"
|
PMC-32C, -48C
|
OUTER
|
11350W
|
230V
|
269217-6
|
11423-29/8RI
|
RING
|
|
35", 48"
|
PMC-32C, -48C
|
OUTER
|
11350W
|
460V
|
269217-2/4
|
11446-29/8RI
|
RING
|
|
ALL SIZES
|
VARIOUS
|
ALL TYPE
|
AS REQUIRED
|
CUSTOM
|
ALL TYPES
|
||
