Types of Vacuum Sensors
10e-10 torr to atmosphere
Penningvac Sensor
Indirect Cold Cathode - Range 1 x 10-8 mbar - 1500 mbar
Ionic Sensor
Indirect Hot Cathode- Range 10-10 to 10-1 mbar
Ceravac Transmitters - Direct Measurement
Ionivac IM540 for UHV (ultra-high vacuum)
Bayard-Alpert Cold Cathode Passive Sensor
Vacuum Sensors for Rough Vacuum (1 millitorr to 760 torr)
The vacuum pressure range from atmosphere to ultra-high vacuum (UHV) is over 16 orders of magnitude. To cover this range requires more than one sensor type. High vacuum can be defined from the bottom of the milltorr range to 10e -10 torr. Most high vacuum gauge sensors are packaged with a rough vacuum sensor to cover the entire vacuum range; however, the exception is ultra-hig vacuum (UHV) applications where an additional gauge sensor is needed. High vacuum gauge sensors are ionization gauges which can be either hot cathode or Bayard-Alpert cold cathode.
The measurement range is the decisive factor for an appropriate vacuum gauge. The chart below shows the type sensors and models for the pressure range. The corresponding gauge controller is also provided in the chart for the proper sensor.
Types of Vacuum Sensors
Penningvc Transmitters
These PENNINGVAC transmitters are the perfect gauge for a wide range of applications. Combines a MEMS-Pirani with Penning high vacuum sensor to cover the full vacuum range from atmosphere to high vacuum. Pennivac is an active gauge with input/output a log-linear 0-10V.
Principle of measurement
Cold cathode ionization after Penning combined with thermal conductivity (MEMS Pirani)
Measurement/display rang
1 x 10-8 to 1000 mbar
Ionivac Transmitters
The IONIVAC uses a hot cathode ionization with a Pirani sensor for full range display of vacuum measurement. Ionivac can be used on non-combustible gases and gas mixtures within a wide range of pressures. Optionally, the pressure can be displayed on an integrated display. Ionivac is an active gauge with input/output a log-linear 0-10V.
Principle of measurement
Pirani / hot cathode ionization (Bayard-Alpert) combination
Measurement/display ran
5 x 10-10 to 1000 mbar
CERAVAC Transmitters
The CERAVAC Capacitance Diaphragm Gauge (CDG)direct measurement of an Inconel diaphragm defection to measure vacuum pressure. They are resilient to vibration and pressure bursts and provide excellent resistance to corrosive process gases.
Principle of measurement
Capacitive diaphragm stainless steel sensor
Measurement/display range- 10-5 to 1000 torr
Graphix Series Vacuum Gauge Controller
Vacuum gauge controller with 1-3 channels for all active sensors. Graphix has a 3.5" TFT touchscreen interface, easy to read bar graph display and ability to test to detect leaks using a pressure rise test.
Readout selectable between mbar, Torr, Micron, Pascal or Psi
Up to 6 adjustable set points
Internal and external data-logging (USB port on the front) for configurati- on and real-time measurement data
Sensor control function (degas and zero adjustment)
Selectable languages: English, German, Chinese, Japanese
Display One. Display Two & Display Three Vacuum Gauge Display
Display One (Display Two or Display Three) Vacuum Gauge Displays provides cost effective display technology of vacuum pressures. The Display One can be used with any of the active sensor Leybold Vacuum sensors. Readout selectable between mbar, Torr or Pascal. Chart recorder 0-10V output provided.
Ionivac IM540 Vacuum Gauge for UHV
The IONIVAC IM540 is a Bayard-Alpert sensor vacuum gauge for measuring ultra-high vacuum pressures. The IONIVAC IM540 is a passive gauge system meaning the sensor and read-out must be used together for vacuum pressure measurement. The IM540 has two channels to handle two UHV measurement sensors. One channel can be used for roughing vacuum gauge such as Thermovac or Ceravac Sensor.
Principle of measurement
Bayard-Alpert Cold Cathode
Measurement/display range- 10e-12 to 1100 mbar
