Applications:

• Analytical High Vacuum Applications
• Helium Leak Checking
• Mass Spectrometers
• Load Locks
• High Vacuum Laboratory Applications
• Degassing
• UHV Vacuum Systems
• Semiconductor Tools
• Vacuum Furnaces
• Optical Coating
• Space Simulation
• Electron Beam Microscopy
• Freeze Drying

Turbomolecular High Vacuum Pumps

Oerlikon Leybold is a worldwide leader in turbomolecular pumps. These high vacuum pumps are effective turbine based pumps with blades that direct molecular flowing gases in the direction of the exhaust. Turbo Pumps are extremely effective in the molecular flow range below 10-3 Torr. Oerlikons Leybolds Turbo pumps can flow as high as 10-1 Torr as well as below 10-3 Torr. TURBOVAC is comprised of both mechanical ceramic ball bearing turbos as well as magnetically levitated turbos. From high purity and corrosive gas applications like the semiconductor industry to laboratory use, the TURBOVAC high vacuum pumps are unrivaled.

TURBOVAC Magnetically Levitated Turbo Pumps

The TURBOVAC Mag Levs are hydrocarbon free high vacuum pumps with a long lifetime due to lack of bearing wear. These turbo pumps are especially efficient in pumping corrosive gases and are nearly maintenance free. The magnetic rotor suspension allows for a pressure and pumping range of 10-1 to 10-10 Torr. Originally developed for the semiconductor market, the TURBOVAC Magnetically Levitated Turbos are found throughout industrial applications as well as research. Along with low bearing wear, Mag Lev pumps have high performance in any orientation as well as extremely low vibration and noise.

TURBOVAC Mechanical Rotor Suspension Turbo Pumps

The TURBOVAC Mechanical Turbo Pumps are turbomolecular high vacuum pumps that suspend the rotors on ceramic ball bearings. These pumps can be mounted in any direction as well as allow no grease to enter into the vacuum system due to the encapsulation of the ball bearings. The Ceramic Bearing Turbo Pumps have a pumping speed varying from 35 l/s to 1600 l/s depending on the pump size and gas being pumped. The TURBOVAC Turbo Pumps are an extremely cost effective choice when pumping in the molecular flow range of pressures.