RF Powered Plasma
Generators and Matches
Plasma Processes
DC Power Supplies
DC Pulsed Power
Thermal Detection
RF Power Supply
RF Match Networks
Advanced Energy manufactures RF Power Supplies for all power levels for solar, vacuum coating and semiconductor applicarions. Advanced Energy manufactures RF Generators optimizes film and throughput with unprecedented power accuracy.
Paramount RF Power Delivery Systems
Paramount 3 Kw RF Power Supplies 13.56 fixed or variable into a 50 Ω and non-50 Ω loads. The Paramount enables the next generation of etch and deposition processes with faster process transitions. Your generator to maximize yield and ROI.
Apex RF Power- Delivery Systems
The Apex Series RF Plasma Generators provides a modular design utilizing a suitable chamber mounting capability. The Apex Series provides sophisticated RF-Conversion Technology to offer enhanced product and process reliability.
HFV Variable Frequency 2 MHz Generators
The HPV Variable Frequency RF Power Generator is mainly used for 200mm and 300mm wafer processing for flat panel display. This versatile power generators features include digitally synthesized variable-frequency output and microprocessor control, with output power levels of 5 and 8 kW. In addition, it delivers an output frequency range of 1.765 to 2.165 MHz.
Cesar RF Power Supplies
Cesar RF is a versatile RF Generator consistent RF power-delivery performance, as well as a diverse selection of models, each with a unique set of features and capabilities (2, 4, 13.56, 27.12, and 40.68 MHz; 0.3 to 5 kW; with a variety of user interfaces and input options).
HiLight RF Generators
Compact, lightweight and air-cooled, the 13.56MHz, 600 W HiLight Plasma Generator is the robust choice for low power on-board applications. HiLight Generators are CE compliant and controlled via a 25 pin user port.
Integro RF Generators
The Integro is the economical choice that combines a 13.56MHz 600W Plasma Generator with an auto matching network in a single compact package.
Ovation VHF Power- Delivery Systems
The Ovation fully-integrated, power delivery system enables faster, higher-precision processes, such as those required for demanding narrow-linewidth, dielectric etch processes, through the implementation of a unique power delivery scheme. It is the first to accurately deliver power into a non-50-ohm environment without an external sensor, reacting faster than traditional power supplies.
Navigator Digital Matching Network
The Navigator Digital Matching Network provides reliable matching over load impedances of 15W to 30kW. Equipped with microprocessor-controlled stepper motor circuitry and digital, user-selectable tuning algorithms, it provides greater consistency and accuracy than traditional analog-based tuning methods. This enables it to optimize delivered process power to semiconductor, solar, FPD, and MEMs manufacturing processes, including etch, CVD, HDP-CVD, PVD, and chamber clean applications.
VarioMatch Automatic Matching Networks
The VarioMatch’s high tuning accuracy and speed enable consistant power across a wide range of plasma load conditions (600 W to 5 kW, 2 to 40.68 MHz). VarioMatch Networks are easy to operate and integrate with any existing system.
